Normal view MARC view ISBD view

Microlithography Science and Technology /

Sheats,J.R.(ed)

Microlithography Science and Technology / Sheats,J.R.(ed). - 1st ed - New york: Marcel Dekker, 1998. - iii,777p;23cm

Includes bibliographical references.

ISBN: 0824799534

Dewey Class. No.: 621.381 SHE

Print
Suggest for purchase
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)