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An introduction to microelectromechanical systems engineering /

Maluf,Nadim

An introduction to microelectromechanical systems engineering / Maluf,Nadim. - 2nd ed - Boston: artech House, - xx,283p;25cm - Microelectromechanical systems series .

Includes bibliographical references.

ISBN: 1580535909

Dewey Class. No.: 621.381 MAL

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