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Glow discharge processes :

Chapman, Brian N.

Glow discharge processes : sputtering and plasma etching / Brian N. Chapman. - New York : Wiley, ©1980. - xv, 406 p. : ill. ; 24 cm.

"A Wiley-Interscience publication." Includes index.

Bibliography: p. 397-400.

ISBN: 047107828X 9780471078289

Subjects--Topical Terms:
Sputtering (Physics)
Glow discharges.
Plasma etching.

Dewey Class. No.: 537.52 / CHA

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