Rapid thermal processing of semiconductors /
Borisenko,Victor E.
Rapid thermal processing of semiconductors / Borisenko,Victor E. - New york: Plenum press, 1997. - xv,358p;23cm
Includes bibliographical references.
0306450542
621.38152 BOR
Rapid thermal processing of semiconductors / Borisenko,Victor E. - New york: Plenum press, 1997. - xv,358p;23cm
Includes bibliographical references.
0306450542
621.38152 BOR