Microlithography Science and Technology / Sheats,J.R.(ed).

By: Sheats,J.R.(ed)Material type: Text

TextLanguage: English Publication details: New york: Marcel Dekker, 1998. Edition: 1st edDescription: iii,777p;23cmISBN: 0824799534DDC classification: 621.381 SHE

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Holdings
Item type	Current library	Home library	Call number	Copy number	Status	Date due	Barcode	Item holds
Textbooks	Central Library, TU Textbook Section (Consult Shelf-Guide to locate the book)	Central Library, TU	621.381 SHE (Browse shelf(Opens below))	1	Available		21947

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