Microlithography Science and Technology / Sheats,J.R.(ed).
Material type:
TextLanguage: English Publication details: New york: Marcel Dekker, 1998. Edition: 1st edDescription: iii,777p;23cmISBN: 0824799534DDC classification: 621.381 SHE
| Item type | Current library | Home library | Call number | Copy number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|---|
Textbooks
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Central Library, TU Textbook Section (Consult Shelf-Guide to locate the book) | Central Library, TU | 621.381 SHE (Browse shelf(Opens below)) | 1 | Available | 21947 |
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| 621.381 SEN Microsystem design / | 621.381 SEN Microsystem design / | 621.381 SHA Basic electronics / | 621.381 SHE Microlithography Science and Technology / | 621.381 SHU Compound semiconductor Electronics The age of Maturity / | 621.381 SIM Introductory electronics for scientists and engineers / | 621.381 SIN VLSI (technology,design & basics of microelectronics) / |
Includes bibliographical references.
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