Sheats,J.R.(ed) <br/><br/>
Microlithography Science and Technology / 
Sheats,J.R.(ed). 
 - 1st ed 
 - New york:  Marcel Dekker,  1998. 
 - iii,777p;23cm 
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>0824799534 
<br/><br/><label>Dewey Class. No.: </label>621.381 SHE