Nishi,Yoshio <br/><br/>
Handbook of semiconductor manufacturing technology / 
Nishi,Yoshio. 
 - New york:  Marcel Dekker,  2000. 
 - xiv,1157p;26cm 
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>0824787838 
<br/><br/><label>Dewey Class. No.: </label>660.297 7 HAN