Senturia,Stephen D. <br/><br/>
Microsystem design / 
Senturia,Stephen D. 
 - Boston:  Kluwer academic,  2001. 
 - xxvi,689p;25cm 
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>0792372468 
<br/><br/><label>Dewey Class. No.: </label>621.381 SEN