Maluf,Nadim <br/><br/>
An introduction to microelectromechanical systems engineering / 
Maluf,Nadim. 
 - London:  artech House,  2000. 
 - xix,265p;24cm 
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>0890065810 
<br/><br/><label>Dewey Class. No.: </label>621.381 MAL