Maluf,Nadim <br/><br/>
An introduction to microelectromechanical systems engineering / 
Maluf,Nadim. 
 - 2nd ed 
 - Boston:  artech House, 
 - xx,283p;25cm 
 - Microelectromechanical systems series .
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>1580535909 
<br/><br/><label>Dewey Class. No.: </label>621.381 MAL