TY  - BOOK
AU  - Maluf,Nadim
TI  - An introduction to microelectromechanical systems engineering
T2  - Microelectromechanical systems series
SN  - 1580535909
U1  - 621.381 MAL 
CY  - Boston
PB  - artech House
N1  - Includes bibliographical references
ER  -