Laconte,J <br/><br/>
Micromachined thin-film sensors for SOI_CMOS co-integration / 
Laconte,J. 
 - Netherland:  Springer,  2006. 
 - xiii,292p;26cm 
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>0387288422 
<br/><br/><label>Dewey Class. No.: </label>621.3815 LAC