TY  - BOOK
AU  - Laconte,J
TI  - Micromachined thin-film sensors for SOI_CMOS co-integration
SN  - 0387288422
U1  - 621.3815 LAC 
PY  - 2006///
CY  - Netherland
PB  - Springer
N1  - Includes bibliographical references
ER  -