TY  - BOOK
AU  - Liu, Ai-Qun
TI  - Photonic MEMS devices: design, fabrication and control
T2  - Optical science and engineering
SN  - 9781420045680
U1  - 621.381 PHO 
PY  - 2009///
CY  - Boca Raton
PB  - CRC Press
N1  - Includes bibliographical references
ER  -