TY  - BOOK
AU  - Chapman,Brian N.
TI  - Glow discharge processes : : sputtering and plasma etching / 
SN  - 047107828X
U1  - 537.52 
PY  - 1980///
CY  - New York
PB  - Wiley
KW  - Sputtering (Physics)
KW  - Glow discharges
KW  - Plasma etching
N1  - "A Wiley-Interscience publication."; Includes index; Bibliography: p. 397-400
ER  -