Micro and smart systems /
G. K. Ananthasuresh ... [et al.]
- New Delhi : Wiley, 2019.
- xxvii, 383 p. : ill. ; 24 cm.
Includes bibliographical references.
9788126520701
Microelectromechanical systems--Design and construction
Intelligent control systems
Technology & Engineering --Microelectronics--Electronics
621.381 / MIC