Microelectromechanical systems and devices /  
edited by Zheng Yun Man 
 - New York :   Scitus Academics LLC,   2017.  
 - 270 p.;   24cm.  
<br/><br/> Includes index 
<br/><br/><label>ISBN: </label>9781681175041 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Power electronics<br/>Electromechanical devices
<br/><br/><label>Dewey Class. No.: </label>621.3  / MIC