Chang,C.Y. <br/><br/>
ULSI technology / 
Chang,C.Y. 
 - New York:  McGraw-Hill,  1996. 
 - xxv,726p;525cm 
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>0071141057 
<br/><br/><label>Dewey Class. No.: </label>621.395 CHA