Borisenko,Victor E. <br/><br/>
Rapid thermal processing of semiconductors / 
Borisenko,Victor E. 
 - New york:  Plenum press,  1997. 
 - xv,358p;23cm 
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>0306450542 
<br/><br/><label>Dewey Class. No.: </label>621.38152 BOR