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Foundations of MEMS / Liu, Chang. by Liu, Chang. Edition: 2nd ed.Material type: Text Language: English Publication details: New Delhi: Pearson Education, 2017Availability: Items available for loan: Central Library, TU (8)Location, call number: Textbook Section (Consult Shelf-Guide to locate the book) 621.3 LIU, ... Not available: Central Library, TU: Checked out (2).
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