Glow discharge processes : sputtering and plasma etching / Brian N. Chapman.
Material type:![Text](/opac-tmpl/lib/famfamfam/BK.png)
Item type | Current library | Home library | Call number | Copy number | Status | Date due | Barcode | Item holds |
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Central Library, TU Textbook Section (Consult Shelf-Guide to locate the book) | Central Library, TU | 537.52 CHA (Browse shelf(Opens below)) | 1 | Available | 91400 |
Total holds: 0
"A Wiley-Interscience publication."
Includes index.
Bibliography: p. 397-400.
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