| 000 | 00568nam a2200193Ia 4500 | ||
|---|---|---|---|
| 001 | 21951 | ||
| 008 | 180118s9999||||xx |||||||||||||| ||eng|| | ||
| 020 | _a0471175935 | ||
| 040 |
_aTULIB _cTULIB |
||
| 041 | _aeng | ||
| 082 | _a621.55 LAF | ||
| 100 | _aLafferty,J.M.(ed) | ||
| 245 | 0 |
_aFoundation of Vacuum science and technology / _cLafferty,J.M.(ed). |
|
| 250 | _a1st ed | ||
| 260 |
_aNew york: _bWiley, _c1998. |
||
| 300 | _axxi,715p;23cm | ||
| 504 | _aIncludes bibliographical references. | ||
| 942 | _cBK | ||
| 999 |
_c15095 _d15095 |
||