| 000 | 00627nam a2200205Ia 4500 | ||
|---|---|---|---|
| 001 | 27935 | ||
| 008 | 180118s9999||||xx |||||||||||||| ||eng|| | ||
| 020 | _a1580535909 | ||
| 040 |
_aTULIB _cTULIB |
||
| 041 | _aeng | ||
| 082 | _a621.381 MAL | ||
| 100 | _aMaluf,Nadim | ||
| 245 | 3 |
_aAn introduction to microelectromechanical systems engineering / _cMaluf,Nadim. |
|
| 250 | _a2nd ed | ||
| 260 |
_aBoston: _bartech House, |
||
| 300 | _axx,283p;25cm | ||
| 490 | _aMicroelectromechanical systems series | ||
| 504 | _aIncludes bibliographical references. | ||
| 942 | _cBK | ||
| 999 |
_c18737 _d18737 |
||