| 000 | 00640nam a2200193Ia 4500 | ||
|---|---|---|---|
| 001 | 31575 | ||
| 008 | 180118s9999||||xx |||||||||||||| ||eng|| | ||
| 020 | _a0849312620 | ||
| 040 |
_aTULIB _cTULIB |
||
| 041 | _aeng | ||
| 082 | _a621.381 LYS | ||
| 100 | _aLyshevski, Sergey Edward | ||
| 245 | 0 |
_aMems and nems: systems, devices, and structures / _cLyshevski, Sergey Edward. |
|
| 260 |
_aLondon: _bCRC Press, _c2002. |
||
| 300 | _a461p.;24cm | ||
| 490 | _aNano-and Microscience, Engineering Technology, and Mdeicine | ||
| 504 | _aIncludes bibliographical references. | ||
| 942 | _cBK | ||
| 999 |
_c20865 _d20865 |
||