| 000 | 01279nam a2200301Ia 4500 | ||
|---|---|---|---|
| 001 | 74802 | ||
| 008 | 180118s9999||||xx |||||||||||||| ||eng|| | ||
| 020 | _a9788131764756 | ||
| 040 |
_aTULIB _cTULIB |
||
| 041 | _aeng | ||
| 082 | _a621.3 LIU | ||
| 100 | _aLiu, Chang | ||
| 245 | 0 |
_aFoundations of MEMS / _cLiu, Chang. |
|
| 250 | _a2nd ed. | ||
| 260 |
_aNew Delhi: _bPearson Education, _c2017. |
||
| 300 | _a576p.; 24cm. | ||
| 504 | _aIncludes bibliographical references. | ||
| 942 | _cBK | ||
| 999 |
_c36775 _d36775 |
||