| 000 | 00685nam a22002417a 4500 | ||
|---|---|---|---|
| 001 | 112717 | ||
| 003 | IN-TzU | ||
| 005 | 20240829122201.0 | ||
| 008 | 210809b ||||| |||| 00| 0 eng d | ||
| 020 | _a9781681175041 | ||
| 040 | _aIN-TzU | ||
| 041 | _aeng | ||
| 082 | 0 | 4 |
_a621.3 _bMIC |
| 245 |
_aMicroelectromechanical systems and devices / _cedited by Zheng Yun Man |
||
| 260 |
_aNew York : _bScitus Academics LLC, _c2017. |
||
| 300 |
_a270 p.; _c24cm. |
||
| 500 | _aIncludes index | ||
| 650 |
_aMicroelectromechanical systems _925909 |
||
| 650 |
_aPower electronics _92109 |
||
| 650 |
_aElectromechanical devices _99541 |
||
| 700 |
_aMan, Zheng Yun _948421 |
||
| 942 | _cBK | ||
| 999 |
_c60680 _d60680 |
||